Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics

TL;DR

This paper presents a scalable manufacturing method for diamond quantum photonic devices using silicon masks transferred via microtransfer printing, enabling large-scale production of high-quality quantum microchiplets.

Contribution

It introduces a foundry-compatible fabrication process that improves uniformity, yield, and throughput of diamond quantum photonic structures by using silicon masks transferred onto diamond.

Findings

Demonstrated hundreds of diamond quantum microchiplets with enhanced optical performance

Achieved improved uniformity and yield in device fabrication

Enabled scalable production compatible with semiconductor manufacturing

Abstract

Quantum technologies promise secure communication networks and powerful new forms of information processing, but building these systems at scale remains a major challenge. Diamond is an especially attractive material for quantum devices because it can host atomic-scale defects that emit single photons and store quantum information with exceptional stability. However, fabricating the optical structures needed to control light in diamond typically relies on slow, bespoke processes that are difficult to scale. In this work, we introduce a manufacturing approach that brings diamond quantum photonics closer to industrial production. Instead of sequentially defining each device by lithography written directly on diamond, we fabricate high-precision silicon masks using commercial semiconductor foundries and transfer them onto diamond via microtransfer printing. These masks define large arrays of nanoscale optical structures, shifting the most demanding pattern-definition steps away from the diamond substrate, improving uniformity, yield, and throughput. Using this method, we demonstrate hundreds of diamond "quantum microchiplets" with improved optical performance and controlled interaction with quantum emitters. The chiplet format allows defective devices to be replaced and enables integration with existing photonic and electronic circuits. Our results show that high-quality diamond quantum devices can be produced using scalable, foundry-compatible techniques. This approach provides a practical pathway toward large-scale quantum photonic systems and hybrid quantum-classical technologies built on established semiconductor manufacturing infrastructure.