SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis

TL;DR

SiMiC introduces an attention-based CNN approach for automated, accurate silicon microstructure analysis from SEM images, enhancing efficiency and reproducibility in field-emission tip characterization.

Contribution

The paper presents a novel deep learning framework with attention mechanisms for silicon microstructure classification and measurement, improving over classical methods.

Findings

High accuracy in microstructure classification

Reduced manual intervention in SEM image analysis

Enhanced interpretability of deep learning models

Abstract

Accurate characterization of silicon microstructures is essential for advancing microscale fabrication, quality control, and device performance. Traditional analysis using Scanning Electron Microscopy (SEM) often requires labor-intensive, manual evaluation of feature geometry, limiting throughput and reproducibility. In this study, we propose SiMiC: Context-Aware Silicon Microstructure Characterization Using Attention-Based Convolutional Neural Networks for Field-Emission Tip Analysis. By leveraging deep learning, our approach efficiently extracts morphological features-such as size, shape, and apex curvature-from SEM images, significantly reducing human intervention while improving measurement consistency. A specialized dataset of silicon-based field-emitter tips was developed, and a customized CNN architecture incorporating attention mechanisms was trained for multi-class microstructure classification and dimensional prediction. Comparative analysis with classical image processing techniques demonstrates that SiMiC achieves high accuracy while maintaining interpretability. The proposed framework establishes a foundation for data-driven microstructure analysis directly linked to field-emission performance, opening avenues for correlating emitter geometry with emission behavior and guiding the design of optimized cold-cathode and SEM electron sources. The related dataset and algorithm repository that could serve as a baseline in this area can be found at https://research.jingjietan.com/?q=SIMIC