A comprehensive semi-automated fabrication system for quartz tuning fork AFM probe with real-time resonance frequency monitoring and Q-factor control
Hankyul Koh, Joon-Hyuk Ko, Wonho Jhe

TL;DR
This paper introduces a semi-automated fabrication system for quartz tuning fork AFM probes that ensures precise tip placement, real-time resonance monitoring, and Q-factor control, enhancing reproducibility and broadening application scope.
Contribution
The work presents a novel integrated system for semi-automated QTF-AFM probe fabrication with real-time resonance and Q-factor management, improving consistency and usability.
Findings
Consistent probe fabrication across multiple trials.
Preservation of sharp resonance responses.
High-resolution imaging in practical tests.
Abstract
Quartz tuning fork-based atomic force microscopy (QTF-AFM) has become a powerful tool for high-resolution imaging of both conductive and insulating samples, including semiconductor structures and metal-coated surfaces as well as soft matter under ambient conditions, while also enabling measurements in more demanding environments including ultrahigh vacuum and cryogenic conditions where conventional cantilever-based AFM often encounters limitations. However, the broader adoption of QTF-AFM has been constrained by the difficulty of attaching a cantilever tip to a quartz tuning fork (QTF) with the positional and angular precision required for repeatable and reproducible probe fabrication. For stable operation, the tip must be placed precisely at the midline of a single tine, aligned parallel to the prong axis, and rigidly secured. Even slight lateral offsets or angular deviations disrupt…
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Taxonomy
TopicsForce Microscopy Techniques and Applications · Near-Field Optical Microscopy · Mechanical and Optical Resonators
