Decentralized Motion and Resonant Damping Control for High-Bandwidth and Cross-Coupling Reduction in MIMO Nanopositioners

TL;DR

This paper introduces a decentralized control approach for MIMO nanopositioners that effectively reduces resonances and cross-coupling, significantly improving bandwidth and disturbance rejection in high-precision applications.

Contribution

A novel dual-loop control strategy combining resonant damping and motion control for each axis, enabling high bandwidth and reduced cross-coupling in nanopositioners.

Findings

Bandwidth beyond first structural mode achieved

Cross-axis coupling significantly reduced

Disturbance rejection improved

Abstract

Piezoelectric nanopositioning systems are widely used in precision applications that require nanometer accuracy and high-speed motion; however, lightly damped resonances and pronounced cross-axis coupling severely limit bandwidth and disturbance rejection. This paper presents a decentralized dual-loop control strategy for a two-axis nanopositioner, combining an inner non-minimum-phase resonant damping controller with an outer motion controller on each axis. The dominant diagonal resonance is actively damped to enable closed-loop bandwidths beyond the first structural mode, while a parallel band-pass damping path is specifically tuned to a higher-order resonance that predominantly affects the cross-coupling channels. Experimental results demonstrate that this targeted band-pass damping substantially reduces cross-axis coupling and enhances disturbance rejection, without compromising tracking accuracy.