Demonstration Of A Quantum Magnetometer Chip Based On Proprietary And Scalable 4H-Silicon Carbide Technology

TL;DR

This paper introduces a scalable, power-efficient quantum magnetometer chip using proprietary 4H-Silicon Carbide technology, demonstrating high sensitivity and simplified architecture suitable for industrial applications.

Contribution

It presents a novel, wafer-scale fabrication process for a quantum magnetometer chip based on 4H-SiC, enabling reproducible, industry-grade production with integrated optical waveguides.

Findings

Sensor sensitivities 2-3 orders of magnitude lower than confocal methods

Successful demonstration of coherent control sequences (Rabi, Ramsey, Hahn-echo)

Simplified optical excitation and collection architecture

Abstract

This work presents an industrially scalable, power-efficient and high-performance quantum magnetometer chip based on proprietary 4H-silicon carbide (SiC) technology, leveraging wafer-scale fabrication techniques to optimize V2 silicon vacancy color centers for highly reproducible, industry-grade fabrication with precise control of depth and density. The integration of these color center ensembles into a planar silicon carbide waveguide enables efficient excitation of a large ensemble and simplifies fluorescence extraction compared to standard confocal methods. We report continuous-wave (CW) optically detected magnetic resonance measurements, complemented by Rabi, Ramsey, and Hahn-echo sequences, which demonstrate coherent capabilities of the large embedded ensemble of V2 centers. Based on the data, our device exhibits sensor shot-noise limited sensitivities 2-3 orders of magnitude lower compared to more complex confocal techniques. Collectively, these advancements simplify the quantum sensor architecture, enhance sensitivity, and streamline optical excitation and collection, thereby paving the way for the development of next-generation SiC-quantum sensing technologies.