A MAPS Detector for High Resolution Low Dose EBSD

TL;DR

This paper introduces a novel monolithic active pixel sensor detector for low energy EBSD, enabling high-resolution, low-dose diffraction imaging and defect analysis in materials like ceramics, expanding capabilities beyond existing detectors.

Contribution

Development of a sensitive, monolithic pixel sensor for low energy EBSD that allows detailed diffraction and defect analysis at reduced electron doses.

Findings

Enables EBSD at lower energies and doses than existing detectors.

Provides detailed dislocation defect contrast in diffraction images.

Measures energy of single electron interactions for energy-filtered diffraction patterns.

Abstract

The use of highly sensitive pixelated direct detectors has dramatically improved the performance of high energy instrumentation such as transmission electron microscopy. Here, we describe a recently developed monolithic active pixel sensor designed for low energy scanning electron microscopy applications. This detector enables electron backscatter diffraction (EBSD) at lower energies and dose than are accessible with existing scintillator-coupled detectors, expanding grain orientation mapping capabilities to materials such as ceramics that are poor electron conductors. The high detector sensitivity allows collection of rich diffraction information - providing dislocation defect contrast that is otherwise not accessible via EBSD. Indeed, even the energy of single electron interaction events can be measured with this detector, which we demonstrate to energy filter diffraction patterns revealing details of how diffraction occurs at low energy.