Patterning perovskite colour converters for AR/VR microdisplays

TL;DR

This paper explores the use of patterned perovskite materials for high-resolution RGB colour conversion in AR/VR microdisplays, demonstrating multiple patterning techniques and their suitability for manufacturing.

Contribution

It introduces methods for patterning perovskite colour converters, showing their robustness and compatibility with high-resolution microdisplay fabrication.

Findings

Perovskite patterning techniques include lift-off, negative photoresist, and dry etch.

Perovskites exhibit high absorption and colour purity suitable for microdisplays.

Patterned perovskites are compatible with high-resolution AR/VR applications.

Abstract

Colour conversion offers the clearest path to achieve RGB colours in high resolution microdisplays for AR/VR. With resolutions beyond 5000 ppi (i.e. RGB pitch of 5 um), the thickness of the conversion layers is critical for efficiency and manufacturing. Perovskites outperform other conversion materials (quantum dots or phosphors) with their high absorption coefficients for blue light. In this contribution, we show how perovskite materials, engineered for high optical density and colour purity, can be patterned to produce colour converting pixels. We demonstrate patterning using three approaches (lift-off, negative photoresist and dry etch), and discuss their advantages and disadvantages. The results consolidate the choice of perovskites for AR/VR applications by demonstrating their robustness and compatibility with multiple patterning strategies suitable for high resolution microdisplays.