Modulation of Quantum Transport in Complex Oxide Heterostructures with Proton Implantation
Haidong Liang, Ganesh Ji Omar, Kun Han, Andrew A. Bettiol, Zhen Huang, A. Ariando

TL;DR
This study shows that proton implantation can precisely tune quantum transport in SrTiO3-based heterostructures by balancing charge doping and disorder, enabling control over interfacial electronic states.
Contribution
It introduces proton implantation as a novel method to modulate interfacial quantum transport in complex oxide heterostructures, revealing a nonmonotonic behavior driven by competing effects.
Findings
Charge doping enhances carrier density and mobility at low fluences.
Higher fluences increase disorder, suppressing mobility and causing insulating behavior.
Quantum transport oscillations emerge at low temperatures with controlled proton implantation.
Abstract
The interfacial electronic properties of complex oxides are governed by a delicate balance between charge transfer, lattice distortions, and electronic correlations, posing a key challenge for controlled tunability in materials research. Here, we demonstrate that proton implantation serves as a precise tool for modulating interfacial transport in SrTiO3-based heterostructures. By introducing protons into the SrTiO3 substrate beneath an amorphous (La,Sr)(Al,Ta)O3 capping layer, we uncover a competition between disorder and charge doping induced by implantation. At low implantation fluences below 1x1015 protons/cm2 (1E15), charge doping dominates, leading to an increase in carrier density and mobility, analogous to electrostatic gating effect. This enables the emergence of quantum transport oscillations at low temperature. Conversely, at higher fluences (above 1E15), disorder scattering…
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Taxonomy
TopicsElectronic and Structural Properties of Oxides · Semiconductor materials and devices · Ferroelectric and Piezoelectric Materials
