Development and Potential of new Micro-Mirror Devices Optimized for Astronomy
Massimo Robberto (1, 2), Cuiling Gong (3), Jim Huffman (3), Zoran Ninkov (4), Ivan Puchades (4), Mario Gennaro (1, and 2), Susan A. Kassin (1, 2), Steven A. Smee (2) ((1) Space Telescope Science Institue, (2) Johns Hopkins Univerisity, (3) Texas Christian University

TL;DR
This paper presents the development of advanced micro-mirror arrays optimized for astronomical multi-slit spectroscopy, aiming to improve size, tilt capabilities, and integration for future large-format applications.
Contribution
It introduces a new program to develop 2D MEMS micro-mirror arrays with specific optimization for astronomy, including design, packaging, and control circuitry improvements.
Findings
Initial 1K x 1K devices with 30 micron pixels and 15-degree tilt.
Plans for 2K x 2K arrays with 100 micron pixels and modular tilting.
Leveraging industry expertise for device packaging and electronics.
Abstract
We introduce our new program to develop two-dimensional MEMS arrays of individually addressable micro-mirrors (''Micro-Mirror Devices'', MMDs) specifically optimized for astronomy, multi-slit spectroscopy in particular. After reviewing the main characteristics and performance of the currently available options, Micro Shutter Arrays by NASA/Goddard and Digital Micromirror Devices by Texas Instruments, we present our planned first generation/baseline devices with 30 micron x 30 miron pixel size arranged in a 1K x 1K format with tilt angle 15 degrees. Our goal is to bring to maturity a technology capable of delivering arrays of 2K x 2K element of 100 micron x 100 micron, buttable on two sides to achieve even larger formats. In additions to MEMS design, we will develop the associated device packaging and electronic control circuitry leveraging on the extensive expertise gained in the last…
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