From plasma to pattern: observation and characterization of periodic structure formation in dielectric breakdown channels of electron-irradiated insulators
Nick R. Schwartz, Bryson C. Clifford, Carolyn Chun, Emily H. Frashure, Kathryn M. Sturge, Noah Hoppis, Holly Wilson, Meryl Wiratmo, Jack R. FitzGibbon, Ethan T. Basinger, Brian L. Beaudoin, Raymond J. Phaneuf, John Cumings, Timothy W. Koeth

TL;DR
This study uncovers the physical mechanism behind periodic structures in dielectric breakdown channels of irradiated insulators, identifying the z-pinch entropy mode as the key instability during plasma discharge.
Contribution
It introduces the z-pinch entropy mode as the primary mechanism for structure formation, supported by experimental validation and theoretical modeling.
Findings
Periodic structures have characteristic wavelengths ~80 μm.
The z-pinch entropy mode explains the observed structures.
Discharge plasma parameters match theoretical predictions.
Abstract
Dielectric breakdown of insulators is one of the most common failure modes of electronics in the high-radiation environment of space, but its mechanics remain poorly understood. When electron-irradiated polymethyl methacrylate (PMMA) undergoes breakdown, the resulting channels exhibit striking periodic structures with characteristic wavelengths ~80 {\mu}m in the recently identified ivy-mode channels. These previously unobserved modulations offer unique insights into the physics of ultra-fast dielectric breakdown. Through materials characterization and theoretical modeling, we identify the physical instability mechanism responsible for these structures. Raman spectroscopy reveals that carbon deposition correlates with channel width variations, indicating that periodic structure formation occurs during the plasma discharge phase. We evaluated three candidate instability mechanisms: the…
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Taxonomy
TopicsPlasma Diagnostics and Applications · Semiconductor materials and devices · Copper Interconnects and Reliability
