Dopant site occupancy determined by core-loss-filtered, position-averaged convergent beam electron diffraction
Michael Deimetry, Timothy C. Petersen, Matthew Weyland, and Scott D. Findlay

TL;DR
This paper introduces a method using core-loss-filtered PACBED patterns combined with simulations to determine dopant site occupancy in crystals, enhancing accuracy over traditional measurement techniques.
Contribution
It presents a novel approach that integrates core-loss-filtered PACBED with simulation-based analysis to quantify dopant site occupancy in materials.
Findings
Core-loss-filtered PACBED patterns can be used to measure dopant site occupancy.
Simulation comparison improves quantification accuracy.
Method overcomes limitations of pure measurement-based strategies.
Abstract
In the elastic scattering regime, probe position-averaged convergent beam electron diffraction (PACBED) patterns have proven robust for estimating specimen thickness and mistilt. Through simulation, we show that core-loss-filtered PACBED patterns can be used to measure the site occupancy of a small concentration of dopants in an otherwise known crystal structure. By leveraging the reciprocity between scanning and conventional transmission electron microscopy, we interpret core-loss PACBED patterns using a strategy traditionally used for determining dopant concentrations via energy dispersive X-ray spectroscopy. We show that differences in the interaction range of different elements hinder a purely measurement-based quantification strategy, but that this can be overcome through comparison with simulations that generalize the Cliff-Lorimer k-factors.
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Taxonomy
TopicsElectron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Advanced Electron Microscopy Techniques and Applications
