Nb3Sn coating of SRF cavity by co-sputtering from a composite target
Md Sharifuzzaman Shakel, Grigory V. Eremeev, Anne-Marie Valente-Feliciano, Uttar Pudasaini, and Hani E. Elsayed-Ali

TL;DR
This study demonstrates the successful deposition of Nb3Sn films on SRF cavities via co-sputtering, optimizing annealing processes to achieve high Tc and improved RF performance, advancing the potential for superconducting applications.
Contribution
It introduces a co-sputtering method for Nb3Sn coating on SRF cavities with optimized annealing, achieving high Tc and enhanced RF performance.
Findings
Achieved Nb3Sn films with Tc of 17.78 K on SRF cavities.
Optimized annealing process improved surface homogeneity.
Recoating further enhanced RF performance.
Abstract
We deposited Nb3Sn film on the inner surface of a 2.6 GHz Nb superconducting radiofrequency (SRF) cavity by co-sputtering using a composite of Nb and Sn tube targets in a DC cylindrical magnetron sputtering system, followed by thermal annealing of the coated cavity. An aluminum mockup cavity, replicating a 2.6 GHz Nb SRF cavity geometry, was utilized to optimize deposition parameters, resulting in co-sputtered Nb-Sn films with Sn content of 32 - 42 at. % on the beam tubes and equator positions. Several annealing conditions were investigated to improve the surface homogeneity of the Nb3Sn film. The best co-sputtered Nb-Sn film was achieved after annealing at 600 C for 6 h, followed by annealing at 950 C for 1 h. The best process was applied to a Nb cavity, which was RF tested in a cryogenic dewar. RF testing of the Nb3Sn-coated cavity demonstrated a superconducting transition temperature…
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