50 GHz Piezoelectric Acoustic Filter
Omar Barrera, Jack Kramer, Lezli Matto, Vakhtang Chulukhadze, Sinwoo Cho, Michael Liao, Mark S. Goorsky, and Ruochen Lu

TL;DR
This paper demonstrates a novel 50 GHz piezoelectric acoustic filter using multilayer LiNbO3 technology, achieving the highest frequency to date and promising for future wireless communication applications.
Contribution
It introduces a new multilayer stack design enabling high-frequency acoustic filters up to 50 GHz, surpassing previous frequency limits in piezoelectric filter technology.
Findings
Achieved 50 GHz filter frequency, the highest reported to date.
Demonstrated a compact filter with 3.3 dB IL and 2.9% FBW.
Used multilayer P3F LiNbO3 stack enabling high-order mode operation.
Abstract
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in sequence, thereby allowing efficient exploitation of high-order modes with high quality factor (Q) and coupling coefficient (k2) in a thicker piezoelectric stack. The demonstrated filter is comprised of twelfth-order symmetric (S12) mode lateral-field-excited bulk acoustic wave resonators (XBARs), built on a 4-layer periodically poled piezoelectric (P3F) 128 Y-cut lithium niobate (LiNbO3) stack. The filter exhibits 3.3 dB insertion loss (IL) and a fractional bandwidth (FBW) of 2.9%. The miniature design, with a footprint of 0.36 mm2, makes it promising for future wireless front-end applications. These results represent the highest frequency acoustic…
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