Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces

TL;DR

This paper introduces a method to dynamically tune quasi-Bound States in the Continuum (BIC) resonances in metasurfaces by hybridizing 1D and 2D structures with MEMS, enabling precise control over resonance properties for various optical applications.

Contribution

It demonstrates a novel hybridization approach combining 1D and 2D metasurfaces with MEMS for dynamic resonance tuning, achieving wide spectral range and high precision.

Findings

Spectral tuning range exceeds 60 nm

Resonance linewidths are ultranarrow

Dynamic control of resonance properties demonstrated

Abstract

This work presents a novel approach to create and dynamically control quasi-Bound States in the Continuum (BIC) resonances through the hybridization of 1D and 2D metasurfaces using micro-electromechanical systems (MEMS). By introducing out-of-plane symmetry breaking through a silicon MEMS membrane positioned above a 1D silicon metasurface, the quasi-BIC resonance's central wavelength and quality factor are precisely tuned. The proposed design achieves ultranarrow resonance linewidths with the spectral tuning range exceeding 60 nm while maintaining a constant quality factor. This tuning capability, realized through both horizontal displacement within a 1D metasurface and vertical MEMS membrane movement, offers a new degree of freedom for manipulating quasi-BIC resonances. The proposed hybridization of 2D and 1D metasurfaces using MEMS mechanism provides a practical route to dynamic modulation of transmission resonance characteristics, making it a promising candidate for tunable filters, spectroscopy, imaging, and sensing applications.