Electron beam irradiation-induced transport and recombination in p-type Gallium Oxide grown on (001) \b{eta}-Ga2O3 substrate
Gabriel Marciaga, Jian-Sian Li, Chao-Ching Chiang, Fan Ren, Stephen J. Pearton, Corinne Sartel, Zeyu Chi, Yves Dumont, Ekaterine Chikoidze, Alfons Schulte, Arie Ruzin, Leonid Chernyak

TL;DR
This paper explores how electron beam irradiation affects electron transport and recombination in p-type Gallium Oxide films, revealing temperature-dependent diffusion lengths and defect-related dynamics using EBIC and CL spectroscopy.
Contribution
It provides new insights into defect-related transport phenomena in p-Ga2O3, highlighting the effects of electron beam excitation on diffusion length and recombination processes.
Findings
Electron diffusion length decreases with temperature.
Continuous electron beam exposure elongates diffusion length.
Defect-related processes influence transport and recombination.
Abstract
This study investigates minority electron diffusion length and carrier recombination phenomena within p-type, 300 nm-thick Ga2O3 epitaxial films. Utilizing Electron Beam-Induced Current (EBIC) and Cathodoluminescence (CL) spectroscopy, these characteristics were examined as a function of both temperature and the duration of electron beam excitation. While the electron diffusion length in these p-Ga2O3 films diminish with increasing temperature, a continuous electron beam excitation of a particular location on the surface of a p-Ga2O3 epitaxial layer leads to an elongation of the diffusion length. and decay of cathodoluminescence intensity in that location under beam exposure. These latter two effects are attributed to non-equilibrium electrons, generated by an electron beam, being captured at acceptor-related point defect levels in Gallium Oxide. The activation energies characterizing…
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