Design and Fabrication Of Multiplexed One-Port SAW Resonators On A Single Chip

TL;DR

This paper presents the design, fabrication, and characterization of multiplexed shear horizontal surface acoustic wave (SH-SAW) sensors on a single chip, demonstrating their potential for multi-gas detection in a compact form.

Contribution

It introduces a novel multi-frequency SAW resonator design on a single chip for complex gas detection, with experimental optimization of device parameters.

Findings

Resonators operate near ISM bands with stable temperature performance.

Electrical responses are enhanced by optimizing aperture, IDT pairs, and reflectors.

The device can function as a single electronic nose for complex gases.

Abstract

Shear horizontal surface acoustic wave (SH-SAW) sensors are considered as a viable option for label-free, sensitive, real-time, and cost-effective detection. In this paper, we present the design, the fabrication and the characterization of multiplexed SAW sensors based on a single chip SAW resonator. Operating near the industrial, scientific and medical (ISM) bands, resonators were microfabricated on 42.75{\textdegree} Y (ST) cut Quartz. This substrate was selected due to its traditional association with temperature stability in the design of SAW devices. Parameters like aperture, number of interdigitated electrode (IDT) pairs, IDT wavelengths, and number of reflectors were studied experimentally to enhance electrical responses. Resonance frequency, quality factor and electromechanical coupling were extracted through impedance measurements and fitted with a modified Butterworth-Van Dyke (MBVD) model. Based on these results, we propose a novel design for a multi-frequency device that can serve as a single electronic nose for complex gases detection.