Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)

TL;DR

This paper introduces a novel interferometric surface measurement method using an LCOS SLM as a phase shifter and wavefront compensator, enhancing speed and measurement range over traditional piezo-based systems.

Contribution

The paper presents a new technique that combines phase shifting and wavefront compensation with an LCOS SLM, improving measurement efficiency and range.

Findings

Increased measurement speed compared to piezo-based methods

Enhanced measurement range with the LCOS SLM approach

Simplified setup for interferometric surface measurement

Abstract

We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach.