Strained 2D TMD lateral heterojunctions via grayscale thermal-Scanning Probe Lithography
G. Zambito (1), G. Ferrando (1), M. Barelli (1), M. Ceccardi (1), F. Caglieris (2), D. Marre (1), F. Bisio (2), F. B. de Mongeot (1), M. C. Giordano (1) ((1) Dipartimento di Fisica, Universit\`a di Genova, Genova, Italy, (2) CNR-SPIN, Genova, Italy)

TL;DR
This paper introduces a novel grayscale thermal-Scanning Probe Lithography technique to create nanoscale strained heterojunctions in 2D TMDs, enabling tunable optoelectronic properties for advanced nanoelectronic applications.
Contribution
It presents a maskless, nanoscale strain engineering method for 2D TMD heterojunctions using grayscale t-SPL, which was not previously demonstrated.
Findings
Asymmetric electrical behavior in strained heterojunctions
Nanoscale control of work-function via strain
Potential for tunable nanoelectronic devices
Abstract
Nanoscale tailoring of the optoelectronic response of 2D Transition Metal Dichalcogenides semiconductor layers (TMDs) has been achieved thanks to a novel strain engineering approach based on the grayscale thermal-Scanning Probe Lithography (t-SPL). This method allows the maskless nanofabrication of locally strained 2D MoS2-Au lateral heterojunction nanoarrays that are characterized by asymmetric electrical behavior. 2D MoS2 layers are conformally transferred onto grayscale t-SPL templates characterized by periodic nanoarrays of deterministic faceted nanoridges. This peculiar morphology induces asymmetric and uniaxial strain accumulation in the 2D TMD material allowing to tailor their electrical work-function at the nanoscale level, as demonstrated by Kelvin Probe Force Microscopy (KPFM). The modulation of the electronic response has been exploited to develop periodic nanoarrays of…
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