High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz

TL;DR

This paper introduces high-frequency solidly-mounted bidimensional mode resonators (S2MRs) operating near 16 GHz, demonstrating high quality factors, strong electromechanical coupling, and robust power handling for advanced communication applications.

Contribution

The work presents a novel design of S2MRs with enhanced performance metrics and detailed analysis of wave confinement and energy efficiency, advancing the state-of-the-art in high-frequency resonators.

Findings

Mechanical Q up to 380

Electromechanical coupling coefficient of 4%

Power handling >20 dBm

Abstract

This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental results show mechanical quality factors up to 380, electromechanical coupling coefficients of 4%, and an overall Figure of Merit (FOM=Q *kt2) exceeding 15. Additionally, Q Bode calculation is reported along with an analysis of the piezoelectric energy confinement coefficient showing the impact of thickness-to-wavelength ratio on the acoustic wave confinement. Finally, the devices demonstrate power handling capabilities greater than 20 dBm while achieving close impedance matching to 50 Ohm. These features make them strong candidates for commercial, military, and harsh-environment applications like satellite communications (SATCOM) and Active Electronically Scanned Arrays (AESA).