Spatial mapping of intrinsic and readout nonlinearities in a strongly-driven micromechanical membrane

TL;DR

This study investigates the spatial distribution of nonlinearities in strongly driven micromechanical membranes, revealing phase-dependent intrinsic nonlinearities and spatially patterned high-harmonics generation.

Contribution

It provides the first spatially resolved measurement of intrinsic and readout nonlinearities in high-stress micromechanical membranes, linking phase response to nonlinearity and modeling harmonic patterns.

Findings

Nonlinearity is independent of probing location.

Phase of response reveals intrinsic nonlinearity.

Harmonic patterns resemble ring-like structures.

Abstract

Recently, it was shown that strongly driven micromechanical resonators show mode shapes that strongly differ from the eigenmodes. This raises the question of the origin of this nonlinear behavior. We measure the spatial dependence of the nonlinearities of high-stress micromechanical membranes. The mechanical nonlinearity is determined from the frequency response and is found to be independent of the probing location. It is the phase of the response that is instrumental in extracting that intrinsic nonlinearity. Our interferometric readout results in high-harmonics generation. These harmonics have a clear spatial profile that shows ring-like patterns resembling previous reports. These patterns are reproduced by a model of the displacement-dependent reflection signal in combination with motion amplitudes of the same order as the probing wavelength.