Wireless and passive pressure detection using magneto-mechanical resonances in process engineering
Timo Merbach (1), Felix Kexel (1), Jonas Faltinath (2, 3), Martin M\"oddel (2, 3), Michael Schl\"uter (1), Tobias Knopp (2, 3, 4), Fabian Mohn (2, 3) ((1) Institute of Multiphase Flows, Hamburg University of Technology, Hamburg, Germany, (2) Institute of Biomedical Imaging

TL;DR
This paper presents a magneto-mechanical resonator (MMR) sensor capable of wireless pressure detection in process engineering, with tunable sensitivity and frequency response, validated through experiments and theoretical analysis.
Contribution
The study introduces a novel magneto-mechanical resonator sensor with customizable membrane thickness for precise wireless pressure measurement in process environments.
Findings
Minimum sensitivity of 0.06 Hz/mbar
Maximum readout frequency of 2 Hz
Significant temperature dependence of resonance frequency
Abstract
A custom-developed magneto-mechanical resonator (MMR) for wireless pressure measurement is investigated for potential applications in process engineering. The MMR sensor utilises changes in the resonance frequency caused by pressure on a flexible 3D printed membrane. The thickness of the printed membrane plays a crucial role in determining the performance and sensitivity of MMRs, and can be tailored to meet the requirements of specific applications. The study includes static and dynamic measurements to determine the pressure sensitivity and temporal resolution of the sensor. The results show a minimum sensitivity of and are in agreement with theoretical calculations and measurements. The maximum sensor readout frequency is in this study. Additionally, the temperature dependence of the sensor is investigated, revealing a significant dependence of…
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Industrial Technology and Control Systems
