Dielectric nanotomography based on electrostatic force microscopy: A numerical analysis

TL;DR

This paper presents a theoretical analysis demonstrating that electrostatic force microscopy can be used to obtain nanotomographic information, including size and dielectric properties, of buried nano-objects, paving the way for nondestructive dielectric imaging.

Contribution

It introduces a novel theoretical approach for dielectric nanotomography using EFM, advancing nondestructive nanoscale imaging techniques.

Findings

EFM can image buried nanoscale objects.

Theoretical framework for dielectric property measurement.

Potential applications in materials and life sciences.

Abstract

Electrostatic force microscopy (EFM) can image nanoscale objects buried below the surface. Here, we theoretically show that this capability can be used to obtain nanotomographic information, i.e., the physical dimensions and dielectric properties, of buried nano-objects. These results constitute a first step toward implementing a nondestructive dielectric nanotomography technique based on EFM with applications in materials sciences and life sciences.