A versatile method for nano-fabrication on diamond film: flexible diamond metasurfaces as a demonstration

TL;DR

This paper introduces a versatile mask-transferring method using sugar for nano-fabrication on ultrathin diamond films, enabling the creation of flexible diamond metasurfaces with potential for advanced device applications.

Contribution

It presents a novel, compatible nano-fabrication technique for diamond films, overcoming previous limitations and demonstrating flexible diamond metasurfaces as a proof of concept.

Findings

High geometrical resolution and accuracy in patterning

Successful fabrication of flexible diamond metasurfaces

Potential for diverse diamond-based device applications

Abstract

Diamond exhibits superb performance across a wide range of applications due to its enormous outstanding properties in electronic, photonic and quantum fields. Yet heterogeneous integration of diamond for on-chip functionalities, like 2D materials, remains challenging due to the hard acquisition of scalable, transferable and ultrathin diamond samples. Recently, the edge-exposed exfoliation has been demonstrated as an effective way to produce wafer-scale, freestanding and ultrathin diamond films. However, the incompatibility of the newly developed diamond film with conventional nano-fabrication methods makes it difficult to fabricate diamond film into practical devices. Herein, we demonstrate the mask-transferring by sugar as a versatile method for pattern-definition on diamond films, which shows excellent geometrical resolution and accuracy comparing to conventional approaches. Additionally, based on this method, the flexible all-diamond metasurfaces functioning as structural colors have been achieved, which indicates its huge potential for fabricating more diamond-related devices.