Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge

TL;DR

This paper studies the discharge characteristics of a magnetized cylindrical capacitive plasma, using specialized diagnostics and the second harmonic technique to measure electron energy distribution and analyze magnetic effects on plasma heating.

Contribution

It introduces an in-house diagnostic setup and applies the second harmonic technique to directly measure EEDF in a magnetized cylindrical plasma discharge.

Findings

Magnetic field influences plasma properties and electron energy distribution.

RF electron magnetization affects bulk plasma heating.

External magnetic field impacts overall plasma behavior.

Abstract

This work investigates the discharge properties of a cylindrical magnetized capacitive coupled plasma discharge produced between a pair of coaxial cylinders. For the purpose of diagnosing plasma properties and electron energy distribution function (EEDF), an in-house electronic circuit and an RF-compensated Langmuir probe are devised and constructed. The second harmonic technique (SHT) has been applied to obtain the direct measurement of EEDF and evaluated the effect of RF electron magnetization on the bulk plasma heating within the discharge. The effect of external magnetic field on the overall rise in plasma properties has been verified by use of particle and energy balance equations derived for argon discharge.