Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits

TL;DR

This paper presents a novel 3D mode size converter fabricated on a lithium niobate platform, significantly improving edge coupling efficiency for photonic integrated circuits at 1550 nm.

Contribution

It introduces a new fabrication process for a 3D mode size converter that enhances edge coupling efficiency in lithium niobate photonic circuits.

Findings

Edge coupling efficiency of 1.16 dB/facet for TE mode

Edge coupling efficiency of 0.71 dB/facet for TM mode

Successful fabrication using etching with Si mask

Abstract

We demonstrate efficient edge couplers by fabricating a 3D mode size converter on a lithium niobate-on-insulator photonic platform. The 3D mode size converter is fabricated using an etching process that employs a Si external mask to provide height variation and adjust the width variation through tapering patterns via lithography. The measured edge coupling efficiency with a 3D mode size converter was approximately 1.16 dB/facet for the TE mode and approximately 0.71 dB/facet for the TM mode at a wavelength of 1550 nm.