ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators

TL;DR

This paper introduces high-performance solidly-mounted bidimensional mode resonators using ScAlN on SiC, achieving record KPIs near 16 GHz for potential military and harsh-environment applications.

Contribution

It presents the first implementation of S2MRs exploiting Sezawa mode in ScAlN on SiC with record quality factors and electromechanical coupling in the Ku band.

Findings

Mechanical Q as high as 380

Bode Q approaching 500

Electromechanical coupling of 4.5%

Abstract

This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (kt2) of 4.5%, an overall Figure of Merit (FOM = Qm kt2) exceeding 17, and power handling greater than 20 dBm for devices closely matched to 50 ohms. To the best of the authors' knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications.