Angle measurement method of electronic speckle interferometry based on Michelson interferometer

TL;DR

This paper introduces a novel angle measurement technique using ESPI with a Michelson interferometer, combining geometric and interferometric principles for accurate, wide-range, real-time angle measurement with high robustness.

Contribution

It presents a new method integrating geometric and ESPI principles within a Michelson interferometer for improved angle measurement accuracy and range.

Findings

Achieves accurate angle measurement over a wide range.

Maintains high measurement accuracy in real-time.

Validated through simulations and experiments.

Abstract

{This paper proposes an angle measurement method based on Electronic Speckle Pattern Interferometry (ESPI) using a Michelson interferometer. By leveraging different principles within the same device, this method achieves complementary advantages across various angle ranges, enhancing measurement accuracy while maintaining high robustness. By utilizing CCD to record light field information in real time and combining geometric and ESPI methods, relationships between small angles and light field information are established, allowing for the design of relevant algorithms for real-time angle measurement. Numerical simulations and experiments were conducted to validate the feasibility and practicality of this method. Results indicate that it maintains measurement accuracy while offering a wide angle measurement range, effectively addressing the limitations of small angle measurements in larger ranges, showcasing significant potential for widespread applications in related fields.