Autonomous robotic mechanical exfoliation of two-dimensional semiconductors combined with Bayesian optimization
Fan Yang, Wataru Idehara, Kenya Tanaka, Keisuke Shinokita, Haiyan, Zhao, Kazunari Matsuda

TL;DR
This paper presents an autonomous robotic system combined with Bayesian optimization to efficiently produce high-quality monolayer 2D semiconductors, significantly reducing experimental trials and operator effort.
Contribution
It introduces a novel robotic-experimental framework that automates and optimizes the mechanical exfoliation process for 2D materials using Bayesian methods.
Findings
Optimized exfoliation parameters identified in just 30 trials
Achieved large-area monolayer WSe₂ with high efficiency
Reduced experimental parameter space exploration by 97.5%
Abstract
Simple mechanical exfoliation of layered materials is the most frequently employed method for producing high-quality monolayers of two-dimensional semiconducting materials. However, the mechanical exfoliation by human hands is a microscopically sophisticated process with a large number of microscopic parameters, which requires significant operator efforts and limits the reproducibility in achieving high-quality and large-area monolayer semiconducting materials. Herein, we have proposed a new strategy for the mechanical exfoliation by combining a developed robotic system and Bayesian optimization. We have demonstrated that it is possible to explore the optimized experimental conditions among a large number of parameter combinations for mechanical exfoliation in a relatively small number of experimental trials. Moreover, the entire mechanical exfoliation process from preparation to…
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Taxonomy
TopicsIndustrial Vision Systems and Defect Detection · Advanced Surface Polishing Techniques · Manufacturing Process and Optimization
