Zonal shape reconstruction for Shack-Hartmann sensors and deflectometry

TL;DR

This paper introduces an unbiased data formation model for zonal shape reconstruction in optical metrology, improving accuracy over traditional models by using regularized MAP reconstruction, validated through simulations and experiments.

Contribution

It proposes a new unbiased data formation model for shape reconstruction that removes limitations of classical Fried and Southwell models, enhancing accuracy.

Findings

The new model reduces shape estimation bias.

Regularized MAP reconstruction outperforms classical methods.

Improved high-frequency shape reconstruction on freeform mirrors.

Abstract

Some metrological means, such as Shack-Hartmann, deflectometry sensors or fringe projection profilometry, measure the shape of an optical surface indirectly from slope measurements. Zonal shape reconstruction, a method to reconstruct shape with a high number of degrees of freedom, is used for all of these applications. It has risen in interest with the use of deflectometers for the acquisition of high resolution slope data for optical manufacturing, especially because shape reconstruction is limiting in terms of shape estimation error. Zonal reconstruction methods all rely on the choice of a data formation model, a basis on which the shape will be decomposed, and an estimator. In this paper, we first study the canonical Fried and Southwell models of the literature and analyze their limitations. We show that modeling the slope measurement by a point-wise derivative as they both do can induce a bias on the shape estimation, and that the bases on which the shape is decomposed are imposed because of this assumption. In the second part of this paper, we propose to build an unbiased model of the data formation, without constraints on the choice of the decomposition basis. We then compare these models to the canonical models of Fried and Southwell. Lastly, we perform a regularized MAP reconstruction, and compare the performance in terms of total shape error of this method to the state of the art for the Southwell and Fried models, first by simulation, then on experimental data. We demonstrate that the suggested method outperforms the canonical models in terms of total shape reconstruction error on a deflectometry measurement of the high-frequency content of a freeform mirror.