Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy
Yueyun Chen, Rebekah Jin, Yarin Heffes, Brian Zutter, Tristan P. O'Neill, Jared J. Lodico, B. C. Regan, Matthew Mecklenburg

TL;DR
This paper discusses advancements in energy-dispersive X-ray spectroscopy (EDS) that enable precise chemical shift measurements, expanding its capabilities for elemental analysis in electron microscopy.
Contribution
It introduces improved EDS detector technology that achieves higher energy resolution, allowing detection of chemical shifts in various compounds, complementing existing EELS methods.
Findings
Enhanced EDS resolution enables chemical shift detection.
Chemical shifts observed in Al, Ti, and W compounds.
EDS now complements EELS in chemical analysis.
Abstract
Electron microscopy prevalently uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30-100 eV or 0.01-1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
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Taxonomy
TopicsAdvanced NMR Techniques and Applications · X-ray Diffraction in Crystallography · Radioactive element chemistry and processing
