Integration of solid-state nanopore arrays via dry bonding to photostructured microfluidic networks

TL;DR

This paper reports the integration of a large array of solid-state nanopores into microfluidic networks using dry bonding, enabling parallel measurements and analysis of current blockades and noise.

Contribution

It introduces a high-density nanopore array integrated with microfluidics via dry bonding, advancing parallel nanopore sensing capabilities.

Findings

Successfully integrated 30 nanopores in microfluidic networks

Demonstrated measurement of nanopore signals using external electrodes

Theoretical analysis highlights importance of low series resistance for event resolution

Abstract

The integration and parallelization of nanopore sensors are essential for improving the throughput of nanopore measurements. Solid-state nanopores traditionally have been used in isolation, which prevents the realization of their full potential in applications. In this study, we present the microfluidic integration of an array of 30 nanopores, which, to our knowledge, is the highest number reported to date. Our microfluidic network was fabricated using high-resolution epoxy photoresists, and the solid-state membranes were bonded through a dry process using complementary surface chemistries. We successfully measured integrated nanopores using external electrodes. This paper discusses the limitations of our methods, particularly concerning microfluidic interfacing and scaling to higher channel counts. Additionally, we present theoretical analysis of current blockades and noise in integrated nanopores, predicting that maintaining low series resistance between the nanopore and electrode is crucial for resolving short events.