Magnetic metamaterials by ion-implantation

TL;DR

This paper introduces a precise ion-implantation technique combined with electron-beam lithography to create nanoscale magnetic patterns in thin films, enabling advanced magnetic nanoarray fabrication.

Contribution

It presents a novel additive fabrication method for planar magnetic nanoarrays with high spatial resolution using ion implantation and lithography.

Findings

Successful fabrication of magnetic nanoarrays with minimal surface roughness

Controlled magnetic functionality introduced into Pd films

Demonstration of artificial spin ice lattices with defined magnetization textures

Abstract

We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting $^{56}$Fe$^{+}$ ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.