An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications

TL;DR

This paper introduces a CMOS-based deep-cryogenic temperature sensor operating below 1 K, suitable for quantum computing, with high resolution and low power consumption, integrated in advanced silicon technology.

Contribution

It presents the first CMOS-compatible deep-cryogenic temperature sensor utilizing superconducting thin-film properties for quantum applications.

Findings

Operates at temperatures as low as 15 mK

Achieves temperature resolution below 10 mK

Dissipates only 1.5 microWatts

Abstract

On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6 nA resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 uW and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK.