EBSD and TKD analyses using inverted contrast Kikuchi diffraction patterns and alternative measurement geometries

TL;DR

This paper demonstrates how contrast-inverted Kikuchi diffraction patterns, observed in various electron backscatter diffraction and transmission Kikuchi diffraction scenarios, can be effectively analyzed using physics-based simulated master patterns to improve orientation determination.

Contribution

The study introduces a novel approach of using contrast-inverted master patterns for EBSD and TKD analysis, expanding the capability to interpret inverted contrast Kikuchi patterns in complex samples.

Findings

Contrast-inverted patterns can be successfully indexed using simulated master patterns.

The method increases the evaluable area in TKD and EBSD analyses.

Contrast inversion handling improves orientation accuracy in challenging samples.

Abstract

Electron backscatter diffraction (EBSD) patterns can exhibit Kikuchi bands with inverted contrast due to anomalous absorption. This can be observed, for example, on samples with nanoscale topography, in case of a low tilt backscattering geometry, or for transmission Kikuchi diffraction (TKD) on thicker samples. Three examples are discussed where contrast-inverted physics-based simulated master patterns have been applied to find the correct crystal orientation. As the first EBSD example, self-assembled gold nanostructures made of Au fcc and Au hcp phases on single-crystal germanium were investigated. Gold covered about 12% of the mapped area, with only two-thirds being successfully interpreted using standard Hough-based indexing. The remaining third was solved by brute force indexing using a contrast-inverted master pattern. The second EBSD example deals with maps collected at a non-tilted surface instead of the commonly used 70 degree tilted one. As TKD example, a jet-polished foil made of duplex stainless steel 2205 was examined. The thin part close to the hole edge producing normal-contrast patterns were standard indexed. The areas of the foil that become thicker with increasing distance from the edge of the hole produce contrast-inverted patterns. They covered three times the evaluable area and were successfully processed using the contrast-inverted master pattern. In the last example, inverted patterns collected at a non-tiled sample were mathematically inverted to normal contrast, and Hough/Radon-based indexing was successfully applied.