Study of ion induced Inner Shell Ionization cross section through electron capture mechanism
Sumana Ghosh, Debasis Mitra, and Soumya Chatterjee

TL;DR
This paper develops a comprehensive theoretical model to calculate ion-induced inner shell ionization cross sections via electron capture, incorporating various correction factors and comparing results with experimental data.
Contribution
It introduces an advanced calculation scheme including correction factors and fractional charge states, improving accuracy over previous models.
Findings
Theoretical cross-sections agree well with experimental data.
Correction factors significantly influence the calculated cross-sections.
The model accounts for simultaneous multiple ionization effects.
Abstract
Electron Capture (EC) cross-section from K, L and M shells of the target atoms to the vacant K, L and M shells of the projectile ions have been calculated by deriving the accurate momentum transfer to the captured electrons for different charge states. Several correction factors like polarization correction, relativistic effects (R) of the target wave function, Coulomb-deflection factor (C) due to the effect of the repulsion between the projectile and the target nucleus, correction for projectile energy loss have been introduced. The mean charge state of the projectiles inside the target material has been estimated using suitable empirical models and the fractional charge state distribution has been calculated considering Lorentz distribution. Fractional distribution of charge state of the projectile ions is used to obtain the charge state contributions of the electron capture…
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Taxonomy
TopicsIon-surface interactions and analysis · Mass Spectrometry Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
