Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

TL;DR

This paper compiles and analyzes laser-induced fluorescence transitions for over 160 chemical species relevant to microelectronics and sustainability, providing a crucial reference for diagnostics in plasma applications.

Contribution

It offers a comprehensive, curated list of LIF excitation and fluorescence wavelengths for key species, aiding diagnostic development and modeling.

Findings

Identified overlapping LIF excitation and fluorescence wavelengths among species.

Compiled a detailed database of LIF transitions for relevant chemical species.

Provided a reference resource to facilitate plasma diagnostics in industry applications.

Abstract

A wide variety of feed gases are used to generate low-temperature plasmas for the microelectronics and the sustainability applications. These plasmas often have a complex combination of reactive and non-reactive species which may have spatial and temporal variations in the density, the temperature and the energy. Accurate knowledge of these parameters and their variations is critically important for understanding and advancing these applications through validated and predictive modeling and design of relevant devices. Laser-induced fluorescence (LIF) provides both spatial and temporally resolved information about the plasma-produced radicals, ions, and metastables. However, the use of this powerful diagnostic tool requires the knowledge of optical transitions including excitation and fluorescence wavelengths which may not be available or scattered through a huge literature domain. In this manuscript, we collected, analyzed and compiled the available transitions for laser-induced fluorescence for more than 160 chemical species relevant to the microelectronics industry and the sustainability applications. A list of species with overlapping LIF excitation and fluorescence wavelengths have been identified. This summary is intended to serve as a data reference for LIF transitions and should be updated in the future.