Controlled fabrication of freestanding monolayer SiC by electron irradiation
Yunli Da, Ruichun Luo, Bao Lei, Wei Ji, Wu Zhou

TL;DR
This paper introduces a precise method for fabricating freestanding monolayer SiC within graphene nanopores using electron irradiation and in-situ heating, revealing insights into atom-by-atom self-assembly of 2D materials.
Contribution
It presents a novel electron irradiation technique to control the growth of monolayer SiC within graphene nanopores with atomic precision.
Findings
Controlled patterning of nanopores and SiC growth achieved
Seamless integration of SiC with graphene lattice demonstrated
Insights into atom-by-atom self-assembly of 2D monolayers uncovered
Abstract
The design and preparation of novel quantum materials with atomic precision are crucial for exploring new physics and for device applications. Electron irradiation has demonstrated as an effective method for preparing novel quantum materials and quantum structures that could be challenging to obtain otherwise. It features the advantages of precise control over the patterning of such new materials and their integration with other materials with different functionalities. Here, we present a new strategy for fabricating freestanding monolayer SiC within nanopores of a graphene membrane. By regulating the energy of the incident electron beam and the in-situ heating temperature in a scanning transmission electron microscope (STEM), we can effectively control the patterning of nanopores and subsequent growth of monolayer SiC within the graphene lattice. The resultant SiC monolayers seamlessly…
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Taxonomy
TopicsSilicon Carbide Semiconductor Technologies · Plasma Diagnostics and Applications · Semiconductor materials and devices
