Calibrated absolute optical contrast for high-throughput characterization of horizontally aligned carbon nanotube arrays

TL;DR

This paper introduces Calibrated Absolute Optical Contrast (CAOC), a novel, high-throughput, non-destructive method for accurately characterizing the density of horizontally aligned carbon nanotube arrays, enabling wafer-scale uniformity assessment.

Contribution

The paper presents a new optical contrast calibration technique that improves accuracy and efficiency in high-throughput HACNT array characterization.

Findings

CAOC provides consistent density measurements of HACNT arrays.

It enables rapid wafer-scale uniformity assessment.

The method balances high throughput with high resolution.

Abstract

Horizontally aligned carbon nanotube (HACNT) arrays hold significant potential for various applications in nanoelectronics and material science. However, their high-throughput characterization remains challenging due to the lack of methods with both high efficiency and high accuracy. Here, we present a novel technique, Calibrated Absolute Optical Contrast (CAOC), achieved through the implementation of differential principles to filter out stray signals and high-resolution calibration to endow optical contrast with physical significance. CAOC offers major advantages over previous characterization techniques, providing consistent and reliable measurements of HACNT array density with high throughput and non-destructive assessment. To validate its utility, we demonstrate wafer-scale uniformity assessment by rapid density mapping. This technique not only facilitates the practical evaluation of HACNT arrays but also provides insights into balancing high throughput and high resolution in nanomaterial characterization.