Acoustic and Electromagnetic Co-Modeling of Piezoelectric Devices at Millimeter Wave

TL;DR

This paper presents a comprehensive modeling approach for piezoelectric devices at millimeter wave frequencies, integrating acoustic and electromagnetic effects for improved accuracy in design and validation.

Contribution

It introduces a novel co-modeling method that includes both acoustic and electromagnetic effects at mmWave frequencies, validated with lithium niobate devices.

Findings

High agreement between model and experimental results

Effective modeling of resonators and filters at mmWave frequencies

Potential to guide future compact piezoelectric device design

Abstract

This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and electromagnetic (EM) effects, e.g., self-inductance, in both the circuit-level fitting and finite element analysis, toward higher accuracy at higher frequencies. To validate the method, thin-film lithium niobate (LiNbO3) first-order antisymmetric (A1) mode devices are used as the testbed, achieving great agreement for both the standalone resonators and a fifth-order ladder filter. Upon further development, the reported acoustic and EM co-modeling could guide the future design of compact piezoelectric devices at mmWave and beyond.