Design and fabrication of autonomous electronic lablets for chemical control

TL;DR

This paper presents the design and fabrication of autonomous, rechargeable electronic lablets with integrated supercapacitors, capable of controlling electrokinetic and electrochemical processes at microscale for chemical manipulation.

Contribution

It introduces a novel fabrication process for singulated CMOS-based lablets with integrated supercapacitors and demonstrates their electronic functionality and potential for chemical control.

Findings

Successful fabrication of 100x200 μm lablets with integrated supercapacitors.

Demonstrated electronic functionality of the lablets post-fabrication.

Potential for docking and energy exchange among lablets and surfaces.

Abstract

Lablets are autonomous microscopic particles with programmable CMOS electronics that canvcontrol electrokinetic phenomena and electrochemical reactions in solution via actuator and sensor microelectrodes. The lablets are designed to be rechargeable using an integrated supercapacitor, and to allow docking to one another or to a smart surface for interchange of energy, electronic information and chemicals. In this paper, we describe the design and fabrication of singulated lablets (CMOS2) at the scale of 100 by 200 {\mu}m, with the supercap adjacent to the functional lablet and occupying half the space. In other works, we have characterized the supercap and described the electronic design and proven functionality using arrays of these lablets. Here we present fabrication details for integrating functional coatings and the supercap and demonstrate electronic functionality of the lablets following singulation.