Vibrational modes as the origin of dielectric loss at 0.27$\unicode{x2013}$100 THz in a-SiC:H
B.T. Buijtendorp, A. Endo, W. Jellema, K. Karatsu, K. Kouwenhoven, D. Lamers, A. J. van der Linden, K. Rostem, M. Veen, E. J. Wollack, J. J. A. Baselmans, S. Vollebregt

TL;DR
This study investigates the origin of dielectric loss in hydrogenated amorphous SiC films across a broad THz spectrum, revealing vibrational modes above 10 THz as the primary loss mechanism.
Contribution
It provides the first comprehensive measurement of dielectric loss in a-SiC:H from 0.27 to 100 THz and links loss to vibrational modes above 10 THz.
Findings
Loss dominated by vibrational modes above 10 THz.
Good agreement with Maxwell-Helmholtz-Drude dispersion model.
Loss increases with frequency in the THz range.
Abstract
Low-loss deposited dielectrics are beneficial for the advancement of superconducting integrated circuits for astronomy. In the microwave band (110 GHz) the cryogenic and low-power dielectric loss is dominated by two-level systems. However, the origin of the loss in the millimeter-submillimeter band (0.11 THz) is not understood. We measured the loss of hydrogenated amorphous SiC (a-SiC:H) films in the 0.27100 THz range using superconducting microstrip resonators and Fourier-transform spectroscopy. The agreement between the loss data and a Maxwell-Helmholtz-Drude dispersion model suggests that vibrational modes above 10 THz dominate the loss in the a-SiC:H above 200 GHz.
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Taxonomy
TopicsCopper Interconnects and Reliability · Photonic and Optical Devices · Microwave Engineering and Waveguides
