Optimization of reactively sputtered Mn3GaN films based on resistivity measurements
Christoph S\"urgers, Gerda Fischer, Sihao Deng, Dongmei Hu, and Cong, Wang

TL;DR
This study demonstrates how low-temperature resistivity measurements can optimize the nitrogen content in Mn3GaN films produced by reactive sputtering, improving their structural and electronic properties for spintronics applications.
Contribution
The paper introduces a method to optimize nitrogen incorporation in Mn3GaN films via resistivity measurements, enhancing film quality for antiferromagnetic spintronics.
Findings
Optimized N2 flow yields films with metal-like resistivity behavior.
Resistivity measurements serve as an effective indicator of structural disorder.
Films show lattice contraction and high resistivity ratios under optimal conditions.
Abstract
Mn-based nitrides with antiperovskite structures have several properties that can be utilised for antiferromagnetic spintronics. Their magnetic properties depend on the structural quality, composition and doping of the cubic antiperovskite structure. Such nitride thin films are usually produced by reactive physical vapour deposition, where the deposition rate of N can only be controlled by the N2 gas flow. We show that the tuning of the N content can be optimised using low temperature resistivity measurements, which serve as an indicator of the degree of structural disorder. Several Mn3GaNx films were prepared by reactive magnetron sputtering under different N2 gas flows. Under optimised conditions, we obtain films that exhibit a metal-like temperature dependence, a vanishing logarithmic increase in resistivity towards zero, the highest resistivity ratio and a lattice contraction of 0.4…
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Taxonomy
TopicsGaN-based semiconductor devices and materials · Metal and Thin Film Mechanics · Acoustic Wave Resonator Technologies
