Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication

TL;DR

This paper presents the design, fabrication, and testing of a 13 GHz Scandium-doped Aluminum Nitride overmoded bulk acoustic resonator optimized for high-frequency RF applications like 5G, demonstrating promising experimental results.

Contribution

It introduces a novel 13 GHz OBAR with optimized electrode design and validates its performance for future high-frequency wireless communication.

Findings

Quality factor Qs of 210 at resonance

Coupling coefficient kt2 of 5.2% at 13.3 GHz

Successful experimental validation of simulation predictions

Abstract

This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably in 5G technology and beyond. The Finite Element Analysis (FEA) optimization process targets the top and bottom metal electrode thicknesses, balancing the electromechanical coupling coefficient and acoustic energy distribution to enhance device Figure of Merit (FOM). Experimental results on fabricated devices employing platinum and aluminum as bottom and top electrode, respectively, demonstrate a quality factor at resonance (Qs) of 210 and a coupling coefficient (kt2) of 5.2% at 13.3 GHz for the second bulk thickness overtone, effectively validating the simulation framework and hinting at the possible implementation of OBARs for advanced RF filters in 5G networks.