Adaptive Bayesian Optimization for High-Precision Motion Systems

TL;DR

This paper introduces a real-time, data-driven Bayesian optimization method for adaptive control of high-precision motion systems, enhancing efficiency and safety in controller tuning.

Contribution

It presents a novel real-time Bayesian optimization approach based on GoOSE, with modifications for computational efficiency and parallelization, applied to semiconductor industry motion systems.

Findings

Achieved real-time controller tuning in high-precision systems.

Demonstrated improved performance over baseline methods.

Validated on a semiconductor industry motion system.

Abstract

Controller tuning and parameter optimization are crucial in system design to improve closed-loop system performance. Bayesian optimization has been established as an efficient model-free controller tuning and adaptation method. However, Bayesian optimization methods are computationally expensive and therefore difficult to use in real-time critical scenarios. In this work, we propose a real-time purely data-driven, model-free approach for adaptive control, by online tuning low-level controller parameters. We base our algorithm on GoOSE, an algorithm for safe and sample-efficient Bayesian optimization, for handling performance and stability criteria. We introduce multiple computational and algorithmic modifications for computational efficiency and parallelization of optimization steps. We further evaluate the algorithm's performance on a real precision-motion system utilized in semiconductor industry applications by modifying the payload and reference stepsize and comparing it to an interpolated constrained optimization-based baseline approach.