A system built for both deterministic transfer processes and contact photolithography

TL;DR

This paper presents a versatile, home-built system capable of performing both deterministic transfer of 2D materials and contact photolithography, enabling microfabrication with high precision in a single device.

Contribution

The development of a compact, dual-mode instrument that integrates transfer and photolithography functions in one system, simplifying microfabrication workflows.

Findings

Successfully transferred 2D materials and semiconductors with high precision.

Fabricated micro-scale patterns with feature sizes of 1-2 micrometers.

Demonstrated the system's capability for high-quality device fabrication.

Abstract

A home-built compact system that functions as both a transfer stage for deterministic transfer processes and a mask aligner for contact photolithography, is constructed. The precision translation sample stage and optical microscope are shared between the two modes. In the transfer mode, assisted by either an adhesive or a heating element, the setup has been used to deterministically transfer freestanding semiconductors, 2D materials, and van der Waals electrodes. When configured in photolithography mode, the proposed instrument has been employed to fabricate various micro-scale patterns and devices, with minimum feature sizes of ~1-2 um achieved. Our prototype instrument provides a feasible solution for preforming high quality deterministic transfer and photolithography processes on one single tool in house.