Metasurface-based planar microlenses for SPAD pixels
J\'er\^ome Vaillant (CEA-LETI, UGA), Lucie Dilhan (ST-GRENOBLE), Alain, Ostrovsky (ST-CROLLES), Quentin Abadie (CEA-LETI, UGA), Lilian Masarotto, (CEA-LETI, UGA), Romain Paquet (CEA-LETI, UGA), Micka\"el Cavelier (CEA-LETI,, UGA), Cyril Bellegarde (CEA-LETI, UGA)
TL;DR
This paper introduces metasurface-based planar microlenses for SPAD pixels, offering enhanced light collection and design flexibility over traditional microlenses, validated through fabrication and characterization.
Contribution
It presents two generations of metasurface microlenses integrated on SPAD pixels, demonstrating improved sensitivity and the influence of lithography on performance.
Findings
Validated sensitivity improvement with metasurface microlenses
Demonstrated off-axis light collection capabilities
Highlighted lithography's impact on metasurface performance
Abstract
In this paper we present two design generations of metasurface-based planar microlenses implemented on Front-Side Illumination SPAD pixels. This kind of microlens is an alternative to conventional reflow microlens. It offers more degrees of freedom in term of design, especially the capability to design off-axis microlens to gather light around the SPAD photodiode. The two generations of microlenses have been fabricated on STMicroelectronics SPAD and characterized. We validated the sensitivity improvement offered by extended metasurface-based microlens. We also confirmed the impact of lithography capability on metasurface performances, highlighting the
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Taxonomy
TopicsOptical Wireless Communication Technologies · Photonic and Optical Devices · Advanced Optical Sensing Technologies