Selection of Alternative Local Interconnect Metals: Beyond Traditional Criteria Towards Sustainable and Secure Supply Chains

TL;DR

This paper develops a comprehensive sustainability assessment framework to evaluate alternative metals for semiconductor interconnects, promoting environmentally and socially responsible supply chain decisions.

Contribution

It introduces a holistic framework with seven sustainability aspects to guide the selection of alternative metals in microelectronics manufacturing.

Findings

Ti, Al, Ni, Co, and Mo show favorable sustainability performance

Pt, Ru, Ir, Rh, and Pd have poorer sustainability metrics

The framework aids in integrating sustainability into metal selection processes

Abstract

In response to aggressive scaling demands in semiconductor manufacturing and the growing need to apply sustainable practices, this paper presents a holistic sustainability assessment framework for evaluating alternative metals for advanced applications. The framework, consisting of seven sustainability aspects, aims to guide researchers and industry stakeholders towards decisions fostering a more sustainable and secure future for microelectronics. This study applies the framework to assess the sustainability of alternative local interconnect metals. The framework identifies five metals (Ti, Al, Ni, Co, and Mo) with relatively favourable performance in at least six out of nine specific indicators, while others (Pt, Ru, Ir, Rh, and Pd) exhibit poorer sustainability metrics. The study recommends further analyses, suggesting the incorporation of case-specific functional units and the use of normalization and weighting factors for a comprehensive evaluation. Coupled with traditional technological assessments, this framework equips decision-makers with essential tools to broaden criteria for selecting alternative metals, aligning semiconductor manufacturing with broader sustainability objectives.