A Novel Capacitance-to-Phase Transducer Based on a Simple Resonant Circuit

TL;DR

This paper introduces a room temperature capacitance-to-phase transducer using a modified All-Pass filter and a simple resonant tank circuit, achieving high resolution and potential applications in displacement and electric field measurements.

Contribution

It presents a novel capacitance-to-phase transducer design that combines a modified All-Pass filter with a simple resonant tank circuit for improved sensitivity.

Findings

Achieves a resolution of 10^-11 in a 1 Hz bandwidth.

Predicts a displacement noise of approximately 3 femtometres/√Hz.

Can measure small capacitances typical of MEMS devices.

Abstract

A novel room temperature capacitance-to-phase transducer is described, which uses a modified All-Pass filter architecture combined with a simple series resonant tank circuit with a moderate Q-factor. It is fashioned from a discrete inductor with small dissipation resonating with a grounded capacitor acting as the sensor, to obtain a relative resolution equal to or better than 10-11 in a 1 Hz bandwidth. The transducer converts the change in capacitance to the change in the phase of a carrier signal at the resonance frequency and is configured to act as a close approximation of the almost ideal All-Pass filter. This cancels out the effects of amplitude modulation when the carrier signal is imperfectly tuned to the resonance. When used as a mechanical displacement-to-phase transducer, the predicted position noise was approximately 3 femtometre/rootHz. Other applications of the proposed circuit include the measurement of the electric field, where the sensing capacitor depends on the applied electric field. In addition, the circuit can be easily adapted to function with very small capacitance values (1 - 2 pF) as is typical in MEMS-based transducers.