Photodetector Focal Plane Arrays Integrated with Silicon Micropyramidal Structures in MWIR

TL;DR

This paper demonstrates the integration of silicon micropyramidal structures with MWIR photodetectors, significantly enhancing their signal by focusing light onto the detectors, which improves performance in infrared imaging applications.

Contribution

The work introduces a novel integration of silicon micropyramids with MWIR photodetectors, achieving substantial signal enhancement through light concentration.

Findings

Signal enhancement up to 4 times with micropyramids

Successful integration of micropyramids with PtSi photodetectors

Demonstrated improved light focusing in MWIR detectors

Abstract

Light-concentrating truncated Si micropyramidal arrays with 54.7 degree sidewall angles were successfully integrated with PtSi Schottky barrier photodetectors. Four different devices consisting of 10 x 10 photodetectors with 60 um pitch combined in parallel were tested, where significant enhancement capability was demonstrated by the Si micropyramids. The device consisting of one hundred 22 um square detectors monolithically integrated with the light-concentrating micropyramidal array displayed signal enhancement of up to 4 times compared to the same size 22 um square photodetector device without the light concentrators.