Experimental and theoretical assessment of native oxide in the superconducting TaN
V. Quintanar-Zamora, M. Cedillo-Rosillo, O. Contreras-L\'opez, C., Corona-Garc\'ia, A. Reyes-Serrato, R. Ponce-P\'erez, J. Guerrero-S\'anchez, and J. A. D\'iaz

TL;DR
This study combines experimental and computational methods to investigate native oxide formation in superconducting TaN films, revealing oxygen incorporation and its potential impact on superconducting properties.
Contribution
It provides the first combined experimental and ab-initio analysis of native oxide effects in TaN, highlighting oxygen's role in stability and superconductivity.
Findings
TaN contains up to 26% oxygen impurities despite ultra-high vacuum synthesis.
Oxygen incorporation increases thermodynamic stability of TaOxN1-x models.
Ta-O bonds are mainly ionic, influencing superconducting behavior.
Abstract
In this manuscript, we show through an experimental-computational proof of concept the native oxide formation into superconducting TaN films. First, TaN was synthesized at an ultra-high vacuum system by reactive pulsed laser deposition and characterized in situ by X-ray photoelectron spectroscopy. The material was also characterized ex situ by X-ray diffraction, transmission electron microscopy, and the four-point probe method. It was detected that TaN contained considerable oxygen impurities (up to 26 %O) even though it was grown in an ultra-high vacuum chamber. Furthermore, the impurified TaN evidence a face-centered cubic crystalline structure only and exhibits superconductivity at 2.99 K. To understand the feasibility of the native oxide in TaN, we study the effect of incorporating different amounts of O atoms in TaN using ab-initio calculations. A thermodynamic stability analysis…
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Taxonomy
TopicsMetal and Thin Film Mechanics · Copper Interconnects and Reliability · GaN-based semiconductor devices and materials
